susceptor

n.

基座；感受器；

Patterned microwave susceptor
Rapid thermal annealing of GaAs in a graphite susceptor—comparison with proximity annealing
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD
Chemical vapor deposition coating process employing radiant heat and a susceptor
Clamping ring and susceptor therefor
Proper Orthogonal Decomposition for Flow Calculations and Optimal Control in a Horizontal CVD Reactor
Rapid thermal processing apparatus for processing semiconductor wafers
Wafer support system
Design of gas inlets for the growth of gallium nitride by metalorganic vapor phase epitaxy
Flow and heat transfer in CVD reactors: Comparison of Raman temperature measurements and finite element model predictions