权威例句
Dual Damascene: a ULSI wiring technology
DAMASCENE PROCESSING USING DIELECTRIC BARRIER FILMS
Copper damascene electrodeposition and additives
Damascene copper electroplating for chip interconnections
The chemistry of additives in damascene copper plating
Abrasive‐Free Polishing for Copper Damascene Interconnection
Electromigration reliability issues in dual-damascene Cu interconnections
Recrystallization kinetics of electroplated Cu in damascene trenches at room temperature
Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates
Manufacturability issues with double patterning for 50-nm half-pitch single damascene applications using RELACS shrink and correspon...