权威例句
Dual Damascene: a ULSI wiring technologyDAMASCENE PROCESSING USING DIELECTRIC BARRIER FILMSCopper damascene electrodeposition and additivesDamascene copper electroplating for chip interconnectionsThe chemistry of additives in damascene copper platingAbrasive‐Free Polishing for Copper Damascene InterconnectionElectromigration reliability issues in dual-damascene Cu interconnectionsRecrystallization kinetics of electroplated Cu in damascene trenches at room temperatureSpiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substratesManufacturability issues with double patterning for 50-nm half-pitch single damascene applications using RELACS shrink and correspon...